20 October 1992 Needs for super-smooth surfaces (Invited Paper)
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132104
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Understanding the needs for super smooth optics give insights for optical fabricators tasked to produce them. These needs include substrates for metrology and a host of X-ray applications. In addition to some grazing angle of incidence optics, normal incidence optics with multilayer stacks have been recently produced. These optics have very demanding finish requirements. Lacquer and flow polishing have produced some interesting surfaces.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Theodore T. Saito, Theodore T. Saito, } "Needs for super-smooth surfaces (Invited Paper)", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132104; https://doi.org/10.1117/12.132104
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