20 October 1992 Noncontact measuring methods of optical surface roughness
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132115
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
This paper discusses some non-contact measuring methods of optical surface roughness. Three types of optical interference profilometers researched in China are mentioned. Some unique techniques used in them are introduced. The advantages and disadvantages of them for on-line measuring are discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Feng Liang, Feng Liang, Tianning Cao, Tianning Cao, } "Noncontact measuring methods of optical surface roughness", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132115; https://doi.org/10.1117/12.132115
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