20 October 1992 Phase-shifting common-path interferometers using double-focus lenses for surface profiling
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132120
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Interferometers have come to be used in production processes for surface profiling. Common- path interferometers are becoming important because they are insensitive to environmental disturbances such as mechanical vibration, air turbulence, and thermal drift. Among common- path interferometers, those using double-focus lens are promising because they can easily incorporate phase-shifting technique. In this paper, common-path interferometers using double-focus lenses are described and some experimental results are given. Properties of double focus lenses are investigated and their effect on surface profiling is discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hisao Kikuta, Hisao Kikuta, Koichi Iwata, Koichi Iwata, } "Phase-shifting common-path interferometers using double-focus lenses for surface profiling", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132120; https://doi.org/10.1117/12.132120
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