20 October 1992 Radiation damage of multilayer mirrors for soft x-ray lasers
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132129
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
We have successfully demonstrated double pass enhancement of amplified spontaneous emission of soft x rays, 23.2 and 23.6 nm of 3p - 3s transitions in Ne-like Ge, using an x-ray multilayer mirror. In this paper, we report on the fabrication of the mirror and analysis of its damage suffered during the experiments. The mirror used was a Mo-Si multilayer mirror with the reflectivity of 35% at the wavelength of 23.6 nm, deposited by an rf-sputtering system. In the damaged area of the mirror, only the multilayer was locally evaporated and the bare substrate underneath appeared. The size of the damaged area corresponded to the aperture size. We carried out the simulation on the spatial and temporal distribution of the mirror temperature during the experiment. Assuming that thermal x rays enter the mirror with the largest amount of energy among all the fluxes at the early stage of the enhancement, the result of the simulation can explain the damage feature and the temporal profile of the intensity of the amplified spontaneous emissions.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masami Tsukamoto, Masami Tsukamoto, Masahito Niibe, Masahito Niibe, Yutaka Watanabe, Yutaka Watanabe, Akira Miyake, Akira Miyake, Takashi Iizuka, Takashi Iizuka, Yasuaki Fukuda, Yasuaki Fukuda, Yoshiaki Kato, Yoshiaki Kato, Hiroyuki Shiraga, Hiroyuki Shiraga, Hiroyuki Daido, Hiroyuki Daido, Kensuki Murai, Kensuki Murai, Ciaran L. S. Lewis, Ciaran L. S. Lewis, David Neely, David Neely, Domhnail O'Neill, Domhnail O'Neill, "Radiation damage of multilayer mirrors for soft x-ray lasers", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132129; https://doi.org/10.1117/12.132129


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