20 October 1992 Thickness dependence of the optical constants of thin Pt, Au, and Rh films in the soft x-ray region
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132131
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
The optical constants, (delta) equals 1 - n and k, of very thin platinum, rhodium, and gold films have been determined from the reflectance data measured in the soft x-ray region of 60 - 900 eV. Five platinum films (63 - 153 angstroms in thickness), five rhodium films (53 - 124 angstroms), and nine gold films (49 - 270 angstroms) were prepared by ion-beam sputtering on BK7 glass substrates. A Debye-Waller factor was applied to the Fresnel reflectance to take into account the reflectance degradation due to the roughness in the surface and the interface in the least-squares curve fitting analysis. The optical constants determined for the platinum and rhodium films show little dependence on the film thickness, while those of the gold films show definite dependence in a thickness range of 70 - 120 angstroms.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mihiro Yanagihara, Mihiro Yanagihara, Takaumi Maehara, Takaumi Maehara, Masaki Yamamoto, Masaki Yamamoto, Takeshi Namioka, Takeshi Namioka, } "Thickness dependence of the optical constants of thin Pt, Au, and Rh films in the soft x-ray region", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132131; https://doi.org/10.1117/12.132131
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