20 October 1992 Two holographic methods for flatness testing with subwavelength or multiple-wavelength sensitivity
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132159
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Two holographic methods suited for the measurement of flatness deviation are presented. The first one takes advantage of the basic holographic interferometry arrangement usually meant for deformation analysis of rough bodies. Simple modifications allow flatness measurement of polished surfaces with sub-wavelength sensitivity. Secondly, a new desensitized interferometer is described allowing the measurement of rougher objects, more frequently encountered in engineering practice. The key component of this interferometer is a diffractive optical element produced by recording two wave interference patterns. Desensitization factors ranging from 1 to 100 with respect to a Fizeau interferometer can be achieved. Flatness checks of computer disks demonstrate the possibilities of both interferometers. Deformation measurements performed with the desensitized interferometer are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre Michel Boone, Pierre Michel Boone, Pierre M. Jacquot, Pierre M. Jacquot, } "Two holographic methods for flatness testing with subwavelength or multiple-wavelength sensitivity", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132159; https://doi.org/10.1117/12.132159
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