1 April 1992 Laser interferential profilometer
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Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58652
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine
Abstract
The paper presents an optical scheme for a precise focusing method. The beam reflected from the detail interferes with a reference beam, and optimal parameters for the optical scheme are calculated. It was found that the optical scheme sensibility does not depend on the focusing distance of the second objective.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vyacheslav B. Birman, Vyacheslav B. Birman, V. Sedelnikov, V. Sedelnikov, } "Laser interferential profilometer", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); doi: 10.1117/12.58652; https://doi.org/10.1117/12.58652
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