Optical correlation diagnostics of rough surfaces

Oleg V. Angelsky; Ivan A. Buchkovsky; Igor I. Magun; Peter P. Maksimyak; T. O. Perun

doi:10.1117/12.58645

1 April 1992 Optical correlation diagnostics of rough surfaces

Oleg V. Angelsky, Ivan A. Buchkovsky, Igor I. Magun, Peter P. Maksimyak, T. O. Perun

Author Affiliations +

Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58645
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

An analysis of the current state and prospects of optical correlation systems for structure diagnostics of rough surfaces is given. Several studies resulting in the development of devices for diagnostics of weakly rough surfaces are briefly described.

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Oleg V. Angelsky, Oleg V. Angelsky, Ivan A. Buchkovsky, Ivan A. Buchkovsky, Igor I. Magun, Igor I. Magun, Peter P. Maksimyak, Peter P. Maksimyak, T. O. Perun, T. O. Perun, "Optical correlation diagnostics of rough surfaces", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); doi: 10.1117/12.58645; https://doi.org/10.1117/12.58645

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