1 April 1992 Laser absorption IR-spectrometer for molecular analysis of high purity volatile substances - Detection of trace water concentrations in oxygen, argon and monogermane
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Proceedings Volume 1724, Tunable Diode Laser Applications; (1992) https://doi.org/10.1117/12.58685
Event: Tunable Diode Laser Applications, 1993, Moscow, Russian Federation
Abstract
A setup is reported for molecular analysis of ultrapure volatile substances based on absorption two-channel computerized IR spectrometry with pulsed tunable injection lasers operating within the wavelength range from 4 to 12 microns. The setup is equipped with a heated vacuum system for gas supply and for gas mixtures preparation. Analytic characteristics are estimated in case of water detection in oxygen, argon, and monogermane; the detection limit is 8 x 10 exp -7 vol pct, 4 x 10 exp -7 vol pct, and 4 x 10 exp -7 vol pct, respectively.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Grigory G. Devyatykh, Grigory G. Devyatykh, G. A. Maksimov, G. A. Maksimov, Alexander I. Nadezhdinskii, Alexander I. Nadezhdinskii, V. A. Khorshev, V. A. Khorshev, S. M. Shapin, S. M. Shapin, } "Laser absorption IR-spectrometer for molecular analysis of high purity volatile substances - Detection of trace water concentrations in oxygen, argon and monogermane", Proc. SPIE 1724, Tunable Diode Laser Applications, (1 April 1992); doi: 10.1117/12.58685; https://doi.org/10.1117/12.58685
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