Thermochromic effect of VO2 thin films made by electron beam deposition

Nguyen Nang Dinh; Pham Duy Long; Nguyen Van Hung; Nguyen Quoc Bao; M. Khairul Al Khan

doi:10.1117/12.130556

25 November 1992 Thermochromic effect of VO₂ thin films made by electron beam deposition

Nguyen Nang Dinh, Pham Duy Long, Nguyen Van Hung, Nguyen Quoc Bao, M. Khairul Al Khan

Proceedings Volume 1728, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XI: Chromogenics for Smart Windows; (1992) https://doi.org/10.1117/12.130556
Event: Optical Materials Technology for Energy Efficiency and Solar Energy, 1992, Toulouse-Labege, France

Abstract

Thermochromic VO₂ thin films were prepared by electron beam depositing 99.99% pure metallic vanadium onto the glass substrates followed by annealing post-treatment. The treatment was performed in oxygen pressure ranging from 1 X 10^-3 to 1.5 Torr during the time from 2 to 10 h at a temperature of 723 K. Structural and optical properties of the films were measured as a function of both the annealing time and oxygen pressure. The metal-semiconductor transition of the VO₂ films annealed in 0.3 Torr of gaseous oxygen, for 7 h was observed at T_c approximately equals 345 K. At the temperature below T_c these films are infrared-transparent semiconductors having monoclinic structure. At the temperature above T_c they become metallic structures exhibiting a tetragonal crystalline lattice and their optical transmittance at a wavelength of 1.2 micrometers has decreased to a value as low a 30%.

Citation Download Citation

Nguyen Nang Dinh, Pham Duy Long, Nguyen Van Hung, Nguyen Quoc Bao, and M. Khairul Al Khan "Thermochromic effect of VO₂ thin films made by electron beam deposition", Proc. SPIE 1728, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XI: Chromogenics for Smart Windows, (25 November 1992); https://doi.org/10.1117/12.130556

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