Image information modulation and processing for fringe scanning optical profiler

Jiabi Chen; Zhengze Zhang; Li Zhu

doi:10.1117/12.140364

24 April 1992 Image information modulation and processing for fringe scanning optical profiler

Jiabi Chen, Zhengze Zhang, Li Zhu

Proceedings Volume 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing; (1992) https://doi.org/10.1117/12.140364
Event: Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, 1991, Bishkek, Kirgizstan, Russian Federation

Abstract

Fringe scanning technique is widely used to test the shape of optical element surfaces. In this paper, a method of image information modulation and processing for a fringe scanning optical profile used to measure surface roughness of precision machinery parts is presented. The reference mirror of a classical Linnik microinterferometer is driven by a piezoelectrical transducer (PZT) modulated using saw-wave, and the phase of interfering fringe is shifted linearly. The image data acquisition system, including a CCD array, PZT, DMAC6844, AD7820, has realized high synchronous data sampling frequency of 250 KB/sec and 10 bit A/D converting. The experimental results show that the converted Linnik microinterferometer can measure the roughness of precision surface where Ra is less than 0.01 m and obtain various standard parameters of roughness. Therefore, the function and precision of the instrument could be enhanced significantly.

Citation Download Citation

Jiabi Chen, Zhengze Zhang, and Li Zhu "Image information modulation and processing for fringe scanning optical profiler", Proc. SPIE 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, (24 April 1992); https://doi.org/10.1117/12.140364

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