The trend of the increase of the output energy is obviously as good for UV lasers as for IR lasers. This requires radiation resistant elements, for instance lenses, mirrors, or gratings. Monochromatic radiation can be focused by diffractive optical elements to a diffraction limited focal spot with nearly 100% efficiency. Therefore, diffractive optical elements are well suited for application to industrial laser cutting and welding technology. However, usual holographic gratings are destroyed by an irradiation of a few watts per cm2. To overcome this difficulty electroforming and etching techniques have been developed. We report on the production, calculation, and measurements of efficiency of gratings in copper with grating constants between 0, 5, and 200 micrometers .