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2 March 1993 Holographic interference microscope for the investigation of surface-mounted devices
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Proceedings Volume 1732, Holographics International '92; (1993)
Event: Holographics International '92, 1992, London, United Kingdom
Holographic interferometry is a widely used tool for nondestructive testing of mechanical deformations. In connection with microscopy, it is also possible to investigate very small objects. However, due to the imaging system used to magnify the object, the visibility of the interference pattern is disturbed. This disturbance still remains even if the conjugated reconstruction is applied. To decrease the influence of the imaging system, the aperture must be of small size. To suppress the speckle effect, the hologram should be made as an image plane hologram.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Hornung and Guenther K.G. Wernicke "Holographic interference microscope for the investigation of surface-mounted devices", Proc. SPIE 1732, Holographics International '92, (2 March 1993);

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