2 March 1993 Laser beam writing of computer-generated diffractive optical components
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Proceedings Volume 1732, Holographics International '92; (1993) https://doi.org/10.1117/12.140457
Event: Holographics International '92, 1992, London, United Kingdom
Abstract
A new pattern generator, initially designed for ASIC fabrication, is employed for writing synthetic holograms and other micro-optical components. The specifications and some limits of this machine have been investigated. Test structures and synthetic holograms are shown. Arbitrary patterns with micron resolution, submicron positioning accuracy, large area (up to 150 X 150 mm2 possible), and good quality of the microprofile were demonstrated.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norbert Streibl, Norbert Streibl, M. Heissmeier, M. Heissmeier, Walter P. Hofmann, Walter P. Hofmann, Ulrich W. Krackhardt, Ulrich W. Krackhardt, M. Schrader, M. Schrader, Johannes Schwider, Johannes Schwider, Martin Sperl, Martin Sperl, } "Laser beam writing of computer-generated diffractive optical components", Proc. SPIE 1732, Holographics International '92, (2 March 1993); doi: 10.1117/12.140457; https://doi.org/10.1117/12.140457
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