5 November 1992 Micromachined acoustic matching layers
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Efficient coupling of acoustic energy between different media requires fabrication of materials with precisely controlled acoustic properties. Current materials are formed by suspending particles in an epoxy matrix. Last year, we proposed a technique for making such materials using silicon micromachining. This paper describes the fabrication procedure and acoustic measurements of these materials and their applications. The acoustic properties of the composite materials described in this paper depend on the volume fraction of silicon, and the material used for the other phase of the composite. We investigated two different fillers, epoxy resin and RTV. Silicon structures with graded volume fractions were fabricated to provide broader bandwidth matching.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew I. Haller, Matthew I. Haller, Butrus T. Khuri-Yakub, Butrus T. Khuri-Yakub, } "Micromachined acoustic matching layers", Proc. SPIE 1733, New Developments in Ultrasonic Transducers and Transducer Systems, (5 November 1992); doi: 10.1117/12.130608; https://doi.org/10.1117/12.130608

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