Cooled backside-illuminated CCD for x-ray microscopy application

Hiroaki Aritome; Shigeru Nakayama; Guan-ming Zeng; Hiroyuki Daido; Masahiro Nakatsuka; Sadao Nakai; Makoto Sakurai; Koujun Yamashita

doi:10.1117/12.138740

13 January 1993 Cooled backside-illuminated CCD for x-ray microscopy application

Hiroaki Aritome, Shigeru Nakayama, Guan-ming Zeng, Hiroyuki Daido, Masahiro Nakatsuka, Sadao Nakai, Makoto Sakurai, Koujun Yamashita

Author Affiliations +

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138740
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

In x-ray microscopy applications of CCDs in the water window region, radiation damage in the MOS structure due to x rays is a problem. The backside illuminated CCD is one of the possibilities to solve the problem. This paper reports about a CCD imaging system for x-ray microscopy applications using a backside illuminated CCD (EEV Ltd., CCD 02-06). The system is used for a zone plate x-ray microscope using a laser plasma source. It is effective to take an image with a single x-ray pulse. The dark noise is 1 electron/s/pixel (r.m.s.) at a temperature of -53 degree(s)C. The quantum efficiency is measured between the wavelength of 2.25 - 8 nm.

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Hiroaki Aritome, Shigeru Nakayama, Guan-ming Zeng, Hiroyuki Daido, Masahiro Nakatsuka, Sadao Nakai, Makoto Sakurai, and Koujun Yamashita "Cooled backside-illuminated CCD for x-ray microscopy application", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138740

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