13 January 1993 Cooled backside-illuminated CCD for x-ray microscopy application
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In x-ray microscopy applications of CCDs in the water window region, radiation damage in the MOS structure due to x rays is a problem. The backside illuminated CCD is one of the possibilities to solve the problem. This paper reports about a CCD imaging system for x-ray microscopy applications using a backside illuminated CCD (EEV Ltd., CCD 02-06). The system is used for a zone plate x-ray microscope using a laser plasma source. It is effective to take an image with a single x-ray pulse. The dark noise is 1 electron/s/pixel (r.m.s.) at a temperature of -53 degree(s)C. The quantum efficiency is measured between the wavelength of 2.25 - 8 nm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroaki Aritome, Hiroaki Aritome, Shigeru Nakayama, Shigeru Nakayama, Guan-ming Zeng, Guan-ming Zeng, Hiroyuki Daido, Hiroyuki Daido, Masahiro Nakatsuka, Masahiro Nakatsuka, Sadao Nakai, Sadao Nakai, Makoto Sakurai, Makoto Sakurai, Koujun Yamashita, Koujun Yamashita, } "Cooled backside-illuminated CCD for x-ray microscopy application", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); doi: 10.1117/12.138740; https://doi.org/10.1117/12.138740


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