Design and analysis of a fast two-mirror soft x-ray microscope

David L. Shealy; Cheng Wang; Wu Jiang; L. Jin; Richard B. Hoover

doi:10.1117/12.138760

13 January 1993 Design and analysis of a fast two-mirror soft x-ray microscope

David L. Shealy, Cheng Wang, Wu Jiang, L. Jin, Richard B. Hoover

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138760
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

During the past several years, a number of investigators have addressed the design, analysis, fabrication, and testing of spherical Schwarzschild microscopes for soft-x-ray applications using multilayer coatings. Some of these systems have demonstrated diffraction limited resolution for small numerical apertures. Rigorously aplanatic, two-aspherical mirror Head microscopes can provide near diffraction limited resolution for very large numerical apertures. This paper summarizes the relationships between the numerical aperture, mirror radii and diameters, magnifications, and total system length for Schwarzschild microscope configurations. Also, an analysis of the characteristics of the Head-Schwarzschild surfaces is reported. The numerical surface data predicted by the Head equations have been fit by a variety of functions and analyzed by conventional optical design codes. Efforts have been made to determine whether current optical substrate and multilayer coating technologies will permit construction of a very fast Head microscope which can provide resolution approaching that of the wavelength of the incident radiation.

Citation Download Citation

David L. Shealy, Cheng Wang, Wu Jiang, L. Jin, and Richard B. Hoover "Design and analysis of a fast two-mirror soft x-ray microscope", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138760

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