Design of the second-generation scanning photoemission microscope at the National Synchrotron Light Source

Cheng-Hao Ko; Harald Ade; Janos Kirz; Erik D. Johnson; Steven L. Hulbert; Erik H. Anderson; Dieter P. Kern

doi:10.1117/12.138745

13 January 1993 Design of the second-generation scanning photoemission microscope at the National Synchrotron Light Source

Cheng-Hao Ko, Harald Ade, Janos Kirz, Erik D. Johnson, Steven L. Hulbert, Erik H. Anderson, Dieter P. Kern

Author Affiliations +

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138745
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

During the past few years, we have built and commissioned a scanning photoemission microscope (X1-SPEM). It was the first photoemission microscope to achieve submicron resolution. To improve the performance, we are designing a second generation instrument. The major changes in the instrument are the replacement of the home-made single pass cylindrical mirror analyzer (CMA) with a hemispherical sector analyzer (HSA) and the construction of a new chamber with a scheme to manipulate the zone plate and the order sorting aperture (OSA) with more flexibility. The design concepts and expected performance of the instrument are discussed.

Citation Download Citation

Cheng-Hao Ko, Harald Ade, Janos Kirz, Erik D. Johnson, Steven L. Hulbert, Erik H. Anderson, and Dieter P. Kern "Design of the second-generation scanning photoemission microscope at the National Synchrotron Light Source", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138745

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