Graded period multilayer structures for x-ray optics

Peter J. Biltoft; Steven Falabella; Ralph F. Pombo; Edward H. Noble

doi:10.1117/12.140564

21 January 1993 Graded-period multilayer structures for X-ray optics

Peter J. Biltoft, Steven Falabella, Ralph F. Pombo, Edward H. Noble

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140564
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Our goal for FY 91 was to develop the capability to deposit multilayer thin film coatings of prescribed period gradient onto planar and figured substrates. To accomplish this goal we have extended our use of deposition flux masking to create laterally graded multilayer coatings. In addition, we have constructed a planetary substrate rotation fixture for deposition of axisymmetric graded thickness multilayer structures on planar and figured optics. Materials combinations for the layered synthetic microstructures (LSM's) we have fabricated by these techniques include: tungsten/carbon, molybdenum/silicon, molybdenum disilicide/silicon and chromium carbide/carbon. Soft X-ray diffraction characterization of the LSM's has verified that we have deposited controlled thickness graded period structures.

Citation Download Citation

Peter J. Biltoft, Steven Falabella, Ralph F. Pombo, and Edward H. Noble "Graded-period multilayer structures for X-ray optics", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140564

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