Imaging Schwarzschild multilayer x-ray microscope

Richard B. Hoover; Phillip C. Baker; David L. Shealy; David B. Gore; Arthur B. C. Walker II; Troy W. Barbee Jr.; Ted Kerstetter

doi:10.1117/12.140596

21 January 1993 Imaging Schwarzschild multilayer x-ray microscope

Richard B. Hoover, Phillip C. Baker, David L. Shealy, David B. Gore, Arthur B. C. Walker II, Troy W. Barbee Jr., Ted Kerstetter

Author Affiliations +

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140596
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

We have designed, analyzed, fabricated, and tested Schwarzschild multilayer X-ray microscopes. These instruments use flow-polished Zerodur mirror substrates which have been coated with multilayers optimized for maximum reflectivity at normal incidence at 135 A. They are being developed as prototypes for the Water Window Imaging X-Ray Microscope. Ultrasmooth mirror sets of hemlite grade sapphire have been fabricated and they are now being coated with multilayers to reflect soft X-rays at 38 A, within the biologically important 'water window'. In this paper, we discuss the fabrication of the microscope optics and structural components as well as the mounting of the optics and assembly of the microscopes. We also describe the optical alignment, interferometric and visible light testing of the microscopes, present interferometrically measured performance data, and provide the first results of optical imaging tests.

Citation Download Citation

Richard B. Hoover, Phillip C. Baker, David L. Shealy, David B. Gore, Arthur B. C. Walker II, Troy W. Barbee Jr., and Ted Kerstetter "Imaging Schwarzschild multilayer x-ray microscope", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140596

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