Interferometric methods for assessment of toroidal diffraction grating performance

Phillip C. Baker; Paolo Bergamini; Thomas E. Berger; J. Gethyn Timothy

doi:10.1117/12.140578

21 January 1993 Interferometric methods for assessment of toroidal diffraction grating performance

Phillip C. Baker, Paolo Bergamini, Thomas E. Berger, J. Gethyn Timothy

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140578
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements. This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.

Citation Download Citation

Phillip C. Baker, Paolo Bergamini, Thomas E. Berger, and J. Gethyn Timothy "Interferometric methods for assessment of toroidal diffraction grating performance", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140578

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