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21 January 1993 W/C multilayers deposited on plastic films
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Abstract
W/C multilayers were deposited on plastic films, which had thin thickness and light weight. TEM images showed the surface roughness of the plastic films and the boundary roughness of the multilayers. X-ray reflectivities were measured at wavelengths of 0.154 nm, 0.834 nm, and 0.3 to 0.7 nm. The boundary roughness values of the multilayers deposited on a polyimide film and a Si wafer were estimated to be 1.2 nm and 0.7 nm, respectively.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shoji Seki, Tsukasa Miyazaki, Motoshige Tatsumi, and Koujun Yamashita "W/C multilayers deposited on plastic films", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140565
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