High-speed ellipsometry for the production of thin metal layers

Horst Schwiecker; Bui Dang Doi; Pham Thi Thanh Ha; J. Zilian; Ulrich Schneider; Joerg Heland

doi:10.1117/12.138792

11 December 1992 High-speed ellipsometry for the production of thin metal layers

Horst Schwiecker, Bui Dang Doi, Pham Thi Thanh Ha, J. Zilian, Ulrich Schneider, Joerg Heland

Proceedings Volume 1746, Polarization Analysis and Measurement; (1992) https://doi.org/10.1117/12.138792
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A new ellipsometer concept is presented for which no polarizing optical components in the conventional sense and no moveable elements are necessary. With four beam splitters and four detectors, four intensities are measured. These data are needed to obtain all four Stokes parameters S₀, S₁, ₂, S₃ of the Stokes vector and so the general state of polarization of the radiation. It is shown that it is possible to determine the `optical instrument matrix' A and the `general instrument matrix' B, characterizing the whole measuring system theoretically and experimentally. The results of ex- and in-situ measurements verify the accuracy of this measuring principle. Applying suitable electronics the ellipsometer can be used as a high speed measuring device for (Psi) and (Delta) . Therefore, it is especially useful for real-time ellipsometry to analyze dynamic processes at surfaces and thin films.

Citation Download Citation

Horst Schwiecker, Bui Dang Doi, Pham Thi Thanh Ha, J. Zilian, Ulrich Schneider, and Joerg Heland "High-speed ellipsometry for the production of thin metal layers", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); https://doi.org/10.1117/12.138792

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