11 December 1992 Polarization-based phase-shifting method for shape contours
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A phase shifting technique of changing polarization state in a Twyman-Green interferometer is presented to measure the shape of the object surface. The wavefronts of the reference beam and object beam are orthogonally polarized. They are resolved by a quarter-wave plate and then detected by a polarizer as an analyzer. Four intensity measurements with phase difference associated with polarization variation are used to obtain interferometric phase corresponding to shape contour.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jing Fang, Jing Fang, Y. P. Ma, Y. P. Ma, Hong-Min Shi, Hong-Min Shi, Xuesong Li, Xuesong Li, Guoying Wu, Guoying Wu, } "Polarization-based phase-shifting method for shape contours", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); doi: 10.1117/12.138803; https://doi.org/10.1117/12.138803


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