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13 January 1993 Diffraction reference wavefront laser interferometer
Vladimir K. Kirillovsky
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Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138881
Event: San Diego '92, 1992, San Diego, CA, United States
Abstract
The current presentation describes an interferometer which may be used to improve correction of interferometric measurements. In this device reference wavefront is created in the process of laser beam diffraction when it is focused on 0.5 (lambda) pinhole. The low value of about (lambda) /100 for wavefront errors or (lambda) /200 for the surface errors proves the good quality of the optical systems. A new interferometer has been used for optical shop testing of precision microscope objectives, laser beam researches, etc. Some applications of the new interferometer are presented.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Vladimir K. Kirillovsky "Diffraction reference wavefront laser interferometer", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138881
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