13 January 1993 Diffractive optical elements fabricated by laser direct writing and other techniques
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Abstract
Four different thin DOE pattern generation techniques used at National Optics Institute (NOI) are discussed and compared: laser direct writing in photoresist, microlithography with e-beam masks, holographic recording, and laser assisted microfabrication. NOI special equipment used for each technique is described and applications are presented.
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Pierre Langlois, Hubert Jerominek, Luc Leclerc, Jin Pan, "Diffractive optical elements fabricated by laser direct writing and other techniques", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.142573; https://doi.org/10.1117/12.142573
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