13 January 1993 Effect of refractive microlens array fabrication parameters on optical quality
Author Affiliations +
Abstract
Refractive microlens arrays with lens speed F/1 to F/5 are fabricated by the PROM (photoresist refractive optics by melting) technique. Optimal PROM fabrication parameters are determined from interferometric measurements of the optical quality. Elements in a hexagonal PROM microlens array, composed of 10,000 200 micrometers diameter F/2 lenses on 205 micrometers centers, exhibit less than one-tenth wave deviation from sphere. Four planes of these F/2 microlens arrays, each containing 10,000 lenslets have been assembled into an afocal imaging system.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Theresa Rubico Jay, Margaret B. Stern, Robert E. Knowlden, "Effect of refractive microlens array fabrication parameters on optical quality", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138886; https://doi.org/10.1117/12.138886
PROCEEDINGS
10 PAGES


SHARE
Back to Top