13 January 1993 Effect of refractive microlens array fabrication parameters on optical quality
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Refractive microlens arrays with lens speed F/1 to F/5 are fabricated by the PROM (photoresist refractive optics by melting) technique. Optimal PROM fabrication parameters are determined from interferometric measurements of the optical quality. Elements in a hexagonal PROM microlens array, composed of 10,000 200 micrometers diameter F/2 lenses on 205 micrometers centers, exhibit less than one-tenth wave deviation from sphere. Four planes of these F/2 microlens arrays, each containing 10,000 lenslets have been assembled into an afocal imaging system.
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Theresa Rubico Jay, Margaret B. Stern, Robert E. Knowlden, "Effect of refractive microlens array fabrication parameters on optical quality", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138886; https://doi.org/10.1117/12.138886

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