Fabrication and measurement of fused silica microlens arrays

Keith O. Mersereau; Casimir R. Nijander; Avi Y. Feldblum; Wesley P. Townsend

doi:10.1117/12.138900

13 January 1993 Fabrication and measurement of fused silica microlens arrays

Keith O. Mersereau, Casimir R. Nijander, Avi Y. Feldblum, Wesley P. Townsend

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138900
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

We report fabrication of refractive microlens arrays in fused silica (SiO₂) with a variety of pitches, diameters, and focal lengths. Typical f-numbers range from f/1.5 to f/5. Melted photoresist lenses are made on a fused silica substrate, and etched into the SiO₂ using reactive ion etching (RIE) by carefully controlling the etch ratio. Techniques for microlens testing and measurement are discussed.

Citation Download Citation

Keith O. Mersereau, Casimir R. Nijander, Avi Y. Feldblum, and Wesley P. Townsend "Fabrication and measurement of fused silica microlens arrays", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138900

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available