13 January 1993 Microhybrid integrated devices and components: microphotonic devices
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Abstract
Miniaturized opto-electronic and opto-electro-micromechanic hybrid integrated components are developed utilizing newly developed micro active semiconductor devices (e.g., laser diode, pin-point emission LED), micro optic passive devices (e.g., micro Fresnel lens, grating devices), and micro actuators. As a typical example, high-performance collimated and focused light sources, optical sensing devices, and two dimensional optical scanner are presented in detail.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Koichi Imanaka, Koichi Imanaka, } "Microhybrid integrated devices and components: microphotonic devices", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138899; https://doi.org/10.1117/12.138899
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