Two-dimensional array of AR-coated diffractive microlenses fabricated by thin-film deposition

Edgar Pawlowski; Herbert Engel; Margit Ferstl; Walther Fuerst; Berndt Kuhlow

doi:10.1117/12.138880

13 January 1993 Two-dimensional array of AR-coated diffractive microlenses fabricated by thin-film deposition

Edgar Pawlowski, Herbert Engel, Margit Ferstl, Walther Fuerst, Berndt Kuhlow

Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993) https://doi.org/10.1117/12.138880
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Two dimensional arrays of Fresnel zone micro lenses were fabricated and coated with antireflection layers by ion-beam-sputter deposition technique. The thickness of the layers was controlled by a reflection-wideband-monitoring-system with high accuracy. The lenses have a circular aperture of 2 mm and focal lengths of 70 mm and 20 mm for the wavelength of 0.63 micrometers and focal lengths of 29 mm, 8 mm, and 5.6 mm for the wavelength of 1.52 micrometers . The blazed profile in each zone was approximated by an eight level profile. Such stepped profiles were recorded with several masks, written with e-beam and with photolithographic technology. Our measurements reveal that the spot-sizes of the fabricated microlenses are close to the diffraction limited values, and the diffraction efficiency for the eight level structure is 83 percent.

Citation Download Citation

Edgar Pawlowski, Herbert Engel, Margit Ferstl, Walther Fuerst, and Berndt Kuhlow "Two-dimensional array of AR-coated diffractive microlenses fabricated by thin-film deposition", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); https://doi.org/10.1117/12.138880

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