13 January 1993 Two-dimensional optical position sensor using a dual axis miniature optical scanner
Author Affiliations +
Proceedings Volume 1751, Miniature and Micro-Optics: Fabrication and System Applications II; (1993); doi: 10.1117/12.138891
Event: San Diego '92, 1992, San Diego, CA, United States
Abstract
A novel compact two dimensional optical sensor is proposed. The sensor consists of a piezoelectric actuator driven dual axis miniature optical scanner, a silicon photo diode, and a micro collimated light source with a micro Fresnel lens. By monitoring the beam intensity reflected from the object, the object position and the object size are determined, since the irradiated beam position is precisely identified by monitoring the phase of the applied ac voltage to the actuator. The sensing area as wide as 15 X 15 degrees is achieved with a simple configuration.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroki Kamoda, Hiroshi Goto, Koichi Imanaka, "Two-dimensional optical position sensor using a dual axis miniature optical scanner", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138891; https://doi.org/10.1117/12.138891
PROCEEDINGS
9 PAGES


SHARE
KEYWORDS
Resonators

Optical scanning

Optical sensors

Sensors

Scanners

Silicon

Actuators

Back to Top