13 January 1993 Two-dimensional optical position sensor using a dual axis miniature optical scanner
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A novel compact two dimensional optical sensor is proposed. The sensor consists of a piezoelectric actuator driven dual axis miniature optical scanner, a silicon photo diode, and a micro collimated light source with a micro Fresnel lens. By monitoring the beam intensity reflected from the object, the object position and the object size are determined, since the irradiated beam position is precisely identified by monitoring the phase of the applied ac voltage to the actuator. The sensing area as wide as 15 X 15 degrees is achieved with a simple configuration.
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Hiroki Kamoda, Hiroshi Goto, Koichi Imanaka, "Two-dimensional optical position sensor using a dual axis miniature optical scanner", Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138891; https://doi.org/10.1117/12.138891

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