12 February 1993 Design review of a unique out-of-plane polarimetric scatterometer
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This paper reviews a scatterometer which is capable of measuring scatter throughout most of the sphere surrounding the sample. The instrument can be configured to operate at many different laser wavelengths, or with a broadband source, at virtually any angle of incidence. Automated polarization control of both source and receiver has been accomplished, which allows calculation of incident and scattered Stokes vectors as well as the Mueller matrix associated with either reflective or transmissive samples. This paper forms the background material for the two papers that follow it in this proceeding.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tod F. Schiff, John C. Stover, Daniel J. Wilson, Brett D. Swimley, Mark E. Southwood, Donald R. Bjork, "Design review of a unique out-of-plane polarimetric scatterometer", Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); doi: 10.1117/12.141440; https://doi.org/10.1117/12.141440

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