Improvement of optical heterodyne interferometric microscope

Evgeny M. Zolotov; V. M. Pelekhaty; K. K. Swidzinsky; R. F. Tagiev

doi:10.1117/12.140769

5 February 1993 Improvement of optical heterodyne interferometric microscope

Evgeny M. Zolotov, V. M. Pelekhaty, K. K. Swidzinsky, R. F. Tagiev

Proceedings Volume 1755, Interferometry: Techniques and Analysis; (1993) https://doi.org/10.1117/12.140769
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

We present a modified scheme of an optical heterodyne interferometric microscope. Reference signal is taken from a low-frequency generator rather than a photodiode to improve stability. Slit aperture is introduced to increase the detected signal. Frequencies of acoustic waves applied to the Bragg cell are adjusted to improve spatial resolution.

Citation Download Citation

Evgeny M. Zolotov, V. M. Pelekhaty, K. K. Swidzinsky, and R. F. Tagiev "Improvement of optical heterodyne interferometric microscope", Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); https://doi.org/10.1117/12.140769

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