7 December 1992 Laser processing of sol-gel-derived multilayer interference filters
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Abstract
Optical interference filters were fabricated using multilayers derived from sol-gel SiO2 and SiO2-TiO2 thin films. Laser processing was then used to modify the spectral properties of local regions of these stacks. The feasibility of using laser processing for selectively changing the optical properties of thin film devices was thus demonstrated. Design considerations and some basic limitations of this technique for tuning interference filter colors are then discussed.
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Dunbar P. Birnie, Sharon M. Melpolder, Brian D. Fabes, Brian J.J. Zelinski, Michael J. Hanrahan, Douglas J. Taylor, Lori Weisenbach, "Laser processing of sol-gel-derived multilayer interference filters", Proc. SPIE 1758, Sol-Gel Optics II, (7 December 1992); doi: 10.1117/12.132057; https://doi.org/10.1117/12.132057
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