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20 November 1992 Properties of optically smooth diamond thin films produced by ECR-PACVD
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Optically smooth diamond films were deposited on Al and Si substrates by the ECR-PACVD method. The films on Al were grown on relatively low temperatures and pressures from CH3OH/H2O and were found to have highly defective nanocrystalline structure. The films on c-Si were grown at higher temperatures and pressures from CH4/H2/O2 and were found to consist of highly oriented (100) faceted crystals. The optical constants of the diamond films on c-Si are similar to those of natural diamond.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shu Jin, Marco Fanciulli, Donald Y. Jong, Yi-Wu He, and Theodore D. Moustakas "Properties of optically smooth diamond thin films produced by ECR-PACVD", Proc. SPIE 1759, Diamond Optics V, (20 November 1992);


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