Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere

Kaoru Suzuki; Tetsuya Taniyama; Junji Nakata; Takaya Masutani

doi:10.1117/12.130758

20 November 1992 Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere

Kaoru Suzuki, Tetsuya Taniyama, Junji Nakata, Takaya Masutani

Proceedings Volume 1759, Diamond Optics V; (1992) https://doi.org/10.1117/12.130758
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

We have developed a technique of depositing a synthetic diamond-like carbon film on glass substrates in atmosphere at ambient temperature. By placing a glass substrate within the plume created by irradiating a carbon target with a Nd-YAG laser, we are able to deposit a diamond-like carbon film on the surface of the substrate. Using a highly purified graphite carbon target insures that only carbon ions are ejected and present in the plume. We will provide an analysis of the films by both vertical and diagonal irradiation (see Figs.1(A) and 1(B)), by Raman spectroscopy and electron probe micro analysis.

Citation Download Citation

Kaoru Suzuki, Tetsuya Taniyama, Junji Nakata, and Takaya Masutani "Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); https://doi.org/10.1117/12.130758

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