20 November 1992 Thinning and polishing of diamond films by diffusional reaction with metals
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Substantial thinning/polishing of diamond films (by as much as approximately 100 micrometers ) through simple diffusional reaction at 900 degree(s)C with Mn or Fe is reported. The observed thinning effect is attributed to the diffusional transfer of carbon atoms from diamond to manganese or iron in contact, as these metals exhibit large solid solubility for carbon at the reaction temperature. Mn appears to react with diamond much faster than Fe. Patterning of diamond films by selective area deposition of Mn films followed by reaction heat treatment and chemical etching is also described. These thinning techniques using metal powders, foils, or deposited films may conveniently be used for removal of undesirable parts of the films such as rough growth facets on the top surface or the fine grained bottom layer with inferior physical properties. These techniques also allow simultaneous thinning of a large number of diamond films.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sungho Jin, Sungho Jin, John E. Graebner, John E. Graebner, T. H. Tiefel, T. H. Tiefel, } "Thinning and polishing of diamond films by diffusional reaction with metals", Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130778; https://doi.org/10.1117/12.130778


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