Development and calibration of UV/VUV radiometric sources

J. Mervin Bridges

doi:10.1117/12.140854

22 January 1993 Development and calibration of UV/VUV radiometric sources

J. Mervin Bridges

Proceedings Volume 1764, Ultraviolet Technology IV; (1993) https://doi.org/10.1117/12.140854
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A program exists at NIST to calibrate radiometric sources for the spectral range from 118-350 nm. These include deuterium lamps, hollow-cathode lamps, RF-excited dimer lamps, and wall-stabilized argon arcs. Sources have been calibrated for and used by researchers in solar physics, astrophysics, atmospheric physics (ozone measurements), magnetically controlled fusion, and photobiology. The argon arcs were developed in our laboratory, and provide intense sources of both radiance and irradiance. Calibrations are performed relative to two primary sources, a wall-stabilized hydrogen arc and a 12,000 K black-body line arc, both developed in our laboratory. Also we recently have begun periodic calibrations on the NIST storage ring, SURF II, to insure consistency between our respective radiometric bases. Various sources have been calibrated for space' applications, including several which are flyable. Also, some development and testing of radiometers for semiconductor lithography were recently carried out with an intense argon arc source.

Citation Download Citation

J. Mervin Bridges "Development and calibration of UV/VUV radiometric sources", Proc. SPIE 1764, Ultraviolet Technology IV, (22 January 1993); https://doi.org/10.1117/12.140854

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