12 January 1993 Effect of MTF of digital image acquisition device on phase-measuring profilometry
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Abstract
As affected by MTF of digital ynage acquisition device, the algorithm of phase-measuring profilometry(PMP) 1,2 cannot be regarded as ”point to point” operation.The phase of a point is not only dependent on its N intensity values obtained by digital phase-shifting technique, but also related to its adjacent points. So systematic errors are introduced by MTF.The theoretical analysis is presented, results for simulation and experiment are given.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianyu Su, Xiang Zhou, "Effect of MTF of digital image acquisition device on phase-measuring profilometry", Proc. SPIE 1771, Applications of Digital Image Processing XV, (12 January 1993); doi: 10.1117/12.139112; https://doi.org/10.1117/12.139112
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