New heterodyne interferometer for measuring surface topography

Huijie Zhao; Xifu Qiang; Pengsheng Li; Hua Li

doi:10.1117/12.139240

15 December 1992 New heterodyne interferometer for measuring surface topography

Huijie Zhao, Xifu Qiang, Pengsheng Li, Hua Li

Proceedings Volume 1776, Interferometry: Surface Characterization and Testing; (1992) https://doi.org/10.1117/12.139240
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A new heterodyne interferometer to measure the surface topography is presented. The internal-mirror He-Ne laser used here has very high frequency difference (500 - 600 MHz). The frequency of this laser is stabilized by an intelligent servo circuit based on thermal negative feedback. Its frequency stabilization is better than 10^-8. Besides, an improved interferometer is analyzed which has large measurement scale and is able to measure 3-D surface topography. By using precise phase measuring technique, the system has a height sensitivity of the order of magnitude of angstroms. In addition, the system has good dynamic characteristics.

Citation Download Citation

Huijie Zhao, Xifu Qiang, Pengsheng Li, and Hua Li "New heterodyne interferometer for measuring surface topography", Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); https://doi.org/10.1117/12.139240

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