1 August 1992 Scan system for the subangstrom STEM
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Proceedings Volume 1778, Imaging Technologies and Applications; (1992) https://doi.org/10.1117/12.130963
Event: Optical Engineering Midwest 1992, 1992, Chicago, IL, United States
Abstract
A computer-controlled scan system has been completed for a sub-angstrom resolution STEM (scanning transmission electron microscope). Controlled by a PC-AT, this system is able to control beam scan, unscan, alignment, and correction of aberration. Using this system, the raster size, shape, rotation angle, and raster position may be controlled by subroutines for image generation/transformation. Computer control allows the simultaneous setting of multiple parameters allowing easy operation of the microscope and saving experimenter time.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shengyang Ruan, Shengyang Ruan, Oscar H. Kapp, Oscar H. Kapp, } "Scan system for the subangstrom STEM", Proc. SPIE 1778, Imaging Technologies and Applications, (1 August 1992); doi: 10.1117/12.130963; https://doi.org/10.1117/12.130963
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