Design review of an infrared phase-shifting interferometer

Paul R. DeStefano; Arthur B. Western; H. Philip Stahl; Charles Joenathan

doi:10.1117/12.140937

2 September 1992 Design review of an infrared phase-shifting interferometer

Paul R. DeStefano, Arthur B. Western, H. Philip Stahl, Charles Joenathan

Proceedings Volume 1779, Optical Design and Processing Technologies and Applications; (1992) https://doi.org/10.1117/12.140937
Event: Optical Engineering Midwest 1992, 1992, Chicago, IL, United States

Abstract

The design and system performance of an infrared phase-stepping interferometer is reviewed. This instrument is capable of measuring rms surface roughness with a repeatability of 0.02 waves. The instrument uses a 4-bucket unwrapping algorithm. Calibration of the interferometer and removal of inherent system aberrations are discussed along with the system performance, including repeatability and accuracy. The interferometer is an all-reflective optics design to permit use at any wavelength, accommodating both far- (10.6 micron) and near- (5 micron) infrared sources. Testing applications include infrared windows and surface testing.

Citation Download Citation

Paul R. DeStefano, Arthur B. Western, H. Philip Stahl, and Charles Joenathan "Design review of an infrared phase-shifting interferometer", Proc. SPIE 1779, Optical Design and Processing Technologies and Applications, (2 September 1992); https://doi.org/10.1117/12.140937

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