2 September 1992 Design review of an infrared phase-shifting interferometer
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Proceedings Volume 1779, Optical Design and Processing Technologies and Applications; (1992) https://doi.org/10.1117/12.140937
Event: Optical Engineering Midwest 1992, 1992, Chicago, IL, United States
The design and system performance of an infrared phase-stepping interferometer is reviewed. This instrument is capable of measuring rms surface roughness with a repeatability of 0.02 waves. The instrument uses a 4-bucket unwrapping algorithm. Calibration of the interferometer and removal of inherent system aberrations are discussed along with the system performance, including repeatability and accuracy. The interferometer is an all-reflective optics design to permit use at any wavelength, accommodating both far- (10.6 micron) and near- (5 micron) infrared sources. Testing applications include infrared windows and surface testing.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul R. DeStefano, Arthur B. Western, H. Philip Stahl, Charles Joenathan, "Design review of an infrared phase-shifting interferometer", Proc. SPIE 1779, Optical Design and Processing Technologies and Applications, (2 September 1992); doi: 10.1117/12.140937; https://doi.org/10.1117/12.140937


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