Absolute interferometric surface testing: a stringent need

Karl-Edmund Elssner; Regina Burow; Guenter Schulz; Andreas Vogel

doi:10.1117/12.140979

1 January 1993 Absolute interferometric surface testing: a stringent need

Karl-Edmund Elssner, Regina Burow, Guenter Schulz, Andreas Vogel

Proceedings Volume 1781, Specification and Measurement of Optical Systems; (1993) https://doi.org/10.1117/12.140979
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

The attainable accuracy in interferometric surface testing is limited by the precision of the reference surface (relative testing). Therefore, this surface has to be measured independently with sufficient accuracy as compared to an ideal mathematical surface (absolute testing). The importance of further developments of methods for absolute interferometric testing for the optical shop and for standardization purposes is discussed and emphasized. Results of our own developments in absolute flatness testing are presented.

Citation Download Citation

Karl-Edmund Elssner, Regina Burow, Guenter Schulz, and Andreas Vogel "Absolute interferometric surface testing: a stringent need", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); https://doi.org/10.1117/12.140979

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