1 January 1993 Absolute interferometric surface testing: a stringent need
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Abstract
The attainable accuracy in interferometric surface testing is limited by the precision of the reference surface (relative testing). Therefore, this surface has to be measured independently with sufficient accuracy as compared to an ideal mathematical surface (absolute testing). The importance of further developments of methods for absolute interferometric testing for the optical shop and for standardization purposes is discussed and emphasized. Results of our own developments in absolute flatness testing are presented.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karl-Edmund Elssner, Karl-Edmund Elssner, Regina Burow, Regina Burow, Guenter Schulz, Guenter Schulz, Andreas Vogel, Andreas Vogel, } "Absolute interferometric surface testing: a stringent need", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.140979; https://doi.org/10.1117/12.140979
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