1 January 1993 Micro phase-shifting interferometer for surface measurement
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Abstract
Design and application of a rigid miniaturized phase shift interferometer is presented. The matchbox size instrument has a Twyman-Green setup and an integrated CCD camera. A standard HeNe laser supplies the light through a monomode fiber. The advantages in measuring big and small objects are discussed. The sensor-like instrument can even be integrated into manufacturing equipment.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans-Joerg Heimbeck, Hans-Joerg Heimbeck, } "Micro phase-shifting interferometer for surface measurement", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.140968; https://doi.org/10.1117/12.140968
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