1 January 1993 Roughness and defect characterization of optical surfaces by light-scattering measurements
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The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a fine structure and defects as large structure elements. Roughness measurement on BK7-glass and CaF2 samples is considered using different techniques. The comparison includes the automatic scatterometer STREUIX 2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM (DOT) 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Horst Truckenbrodt, Angela Duparre, Uwe Schuhmann, "Roughness and defect characterization of optical surfaces by light-scattering measurements", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.141001; https://doi.org/10.1117/12.141001

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