1 January 1993 Sphericity and twist as functional parameters to represent surface geometries
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Abstract
Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johan Meijer, Johan Meijer, } "Sphericity and twist as functional parameters to represent surface geometries", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.141000; https://doi.org/10.1117/12.141000
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