Sphericity and twist as functional parameters to represent surface geometries

Johan Meijer

doi:10.1117/12.141000

Abstract

Topographical measurements of surfaces yield a lot of data which are usually presented by tables of height coordinates or by contour maps. Here a method is described to characterize the surface geometry by just a few parameters which quantify the functional properties: sphericity, twist, and waviness. Examples of applications are given from the field of surface plate measurement. Some measurement techniques based on electronic levels, autocollimators and laserinterferometers are briefly discussed. A resulting accuracy of 0.1 micrometers on a one square meter surface is claimed. With the characteristic parameters, even small geometrical changes due to the environmental conditions temperature and moisture could be recorded and explained.

Citation Download Citation

Johan Meijer, Johan Meijer, } "Sphericity and twist as functional parameters to represent surface geometries", Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.141000; https://doi.org/10.1117/12.141000

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