Determination of optical constants of thin films on thick substrates is discussed. The level of information contained in ellipsometric measurements is investigated. The parameters of the most important contribution to the ellipsometric data are selected. An attempt to explain the difficulties of solution of the inverse problem in ellipsometry is carried out.
Kirill M. Kuzanyan,
"Amount of information contained in data of ellipsometric measurements", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141040; https://doi.org/10.1117/12.141040